Porous ceramics
Porous ceramics are ceramics that have many pores.
At Asuzak Corporation's Fine Ceramics Division, we have started working with porous ceramics, offering two types of materials: porous alumina and porous SiC. Currently, we have several product lines available to meet your needs based on different applications. We propose porous ceramics with customizable pore diameters and porosity thanks to our unique molding technology. Porous ceramics are used as adsorption tools for thin wafers and thin films. They allow gas to pass through but not plasma, making them suitable as fixtures for plasma equipment. Due to their porous nature, these ceramics possess insulation and heat resistance. Depending on the size, we can achieve a flatness of about 5μm, enabling high precision in equipment. How about this application? In addition to general porous alumina ceramics, we also handle porous ceramics made of SiC, which can be considered for environments where alumina cannot be used (such as rapid cooling, rapid heating, and the use of hydrofluoric acid-based chemicals). How about using them in the manufacturing of optical lenses that require rapid cooling and heating?
- Company：アスザック ファインセラミックス事業部
- Price：Other
